Cymer celebrates installation of Its 3000th Excimer Laser Light Source
The 3000th install — an XLA 300 argon fluoride (ArF) excimer laser light source, designed to enable volume production of 45nm immersion photolithography applications — was installed at a major Japanese memory chip manufacturer. Since the XL Series was introduced in early 2003, more than 340 of the XL Series light sources have been shipped by the company.
"Worldwide, memory chip revenue is estimated to grow 20 percent by the end of 2006, furthering the demand for technology to support volume-production semiconductor manufacturing," said Ed Brown, Cymer's president and chief operating officer. "This latest installation milestone is a testament to our growing installed base, and our leading role in the manufacture of memory chips. We are pleased that our proven, low-risk platform continues to be the laser light source of choice for top chipmakers around the globe."