News Article
Keithley and Mesatronic to advance parametric wafer probe technology
Keithley Instruments, Inc. announced it has partnered with Mesatronic Group to develop advanced probe cards for semiconductor parametric testers used in RF and low current DC applications.
William Merkel, Marketing Director for the Keithley Parametric Test Product Group, said, "When the new probe cards are available later this year, they can be used with Keithley parametric testers for simultaneous extraction of RF and very low level DC current parameters on any combination of probe pins that contact a semiconductor wafer."
The probes for these cards will also be suitable for the smaller 30-micron test pads toward which the industry is migrating. Currently, performing simultaneous low current DC and RF measurements is complicated by the fact that existing cards have only a few dedicated RF probe pins, and they cannot be used for accurate low current DC measurements.