Tegal receives order from leading analogue manufacturer
The new Endeavor system will be shipped to a fab in Europe and will be used in the development and production of a variety of analogue and power devices.The Endeavor PVD system will be used to deposit metals for power management devices, including new materials incorporating a mixture of silicon and chromium (SiCr). Such materials have a large range of resistance with low variation due to voltage and temperature, making them ideal resistors for use in advanced analogue device applications. The devices produced on the Endeavor PVD system will be incorporated in a wide variety of wireless, networking, automotive, consumer electronics and cell phone applications.
"The Endeavor PVD System was selected on the basis of the its capabilities in S-Gun to precisely tune the compound structure of these new films," said Thomas Mika, Chairman, President & CEO of Tegal Corporation. "We continue to focus our company on the deposition and etching of new materials that are increasingly being incorporated into advanced microelectronic devices."