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Inauguration of new state-of-the-art 200mm MEMS production line in Italy

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STMicroelectronics has inaugurated a new 200mm (8-inch) semiconductor wafer fabrication line dedicated to MEMS devices at its manufacturing site at Agrate, near Milan, Italy.

STMicroelectronics has inaugurated a new 200mm (8-inch) semiconductor wafer fabrication line dedicated to MEMS devices at its manufacturing site at Agrate, near Milan, Italy. ST is the first major MEMS manufacturer in the world to produce devices using 200mm wafers, which will reduce unit costs and accelerate both the expansion of current applications and the development of new MEMS markets.

MEMS technology, which allows the electrical and mechanical properties of silicon to be simultaneously exploited, is being rapidly adopted in a wide range of computer, consumer, automotive and industrial applications where the ability to measure or detect physical movement or inclination can be valuable in saving energy, making appliances easier to use, and providing a new level of realism and interaction in gaming systems.

“As we move established manufacturing technologies to the Far East, in keeping with the global manufacturing trend, we are also continually capitalizing on the intellectual talents of Europe. Our MEMS technology was originally developed in our nearby Castelletto design centre, which is still our powerhouse for MEMS innovation, and we are proud that Agrate now hosts the world’s most advanced MEMS production line,” said Pietro Palella, General Manager, STMicroelectronics Italy.

The inauguration event featured a round-table discussion of Italy’s role in high-tech industries by leading Italian academics, writers and industrialists, an overview of MEMS markets and opportunities presented by Benedetto Vigna, General Manager of ST’s MEMS Business Unit, and a customer application example inside laptop computers, presented by Mr. Hisao Tsukazawa, Group Manager of Toshiba’s PC Development Centre.

“With a forecasted growth of around 100% in the five years from 2005 to 2010, the MEMS market is one of the most exciting segments of the semiconductor industry and the new state-of-the-art production line we have started in Agrate will allow us to further build on our leadership position in this area,” said Benedetto Vigna.

So far, ST has invested approximately $40 million in transforming a former 150mm (6-inch) production area into a leading-edge MEMS production line. The new line, which currently occupies approximately 1,300 square meters and employs more than 100 people, is fully dedicated to MEMS devices, and also supports the MEMS R&D activities based in Castelletto. The area will be further increased to 2500 square meters in line with market demand.

With the worldwide MEMS market heading towards $10 billion by 2010*, the new MEMS production line will manufacture the hundreds of millions of parts of innovative accelerometers, gyroscopes, miniature microphones and pressure sensors required to serve the expanding market needs.

* ST estimate based on data from market research analysts In-Stat, Nexus and Yole Development.

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