Hynix selects ASML for advanced process development
ASML Holding (ASML) announced that Hynix Semiconductor Inc., has standardized on ASML's LithoCruiser software for the company's process development activity. Hynix has purchased multiple licenses of LithoCruiser to perform lithography simulation and optimization for critical layers in all sub-60-nanometer DRAM and flash memory devices.
"As a provider of memory devices, it is critical for us to maximize the imaging performance and process windows in our production fabs," said Dr. Dong Gyu Yim, Senior Member of Technical Staff, R&D Department, Hynix. "ASML proved to be a trusted partner by implementing all the necessary functions and features in LithoCruiser that fully met our requirements."
"We are proud that Hynix has selected LithoCruiser as the process development tool of choice for their next generation DRAM and flash memory devices," said Dinesh Bettadapur, president and CEO, ASML MaskTools. "Hynix's choice to standardize on LithoCruiser demonstrates ASML's commitment to providing our customers with innovative lithography capabilities to enable their advanced process development."