News Article
Axcelis wins RapidCure FC sale to Japan’s CASMAT
Axcelis Technologies, Inc., reported it has received an order for its RapidCure FC film curing system from Japan's Consortium for Advanced Semiconductor Materials and Related Technologies (CASMAT).
Axcelis Technologies, Inc., reported it has received an order for its RapidCure FC film curing system from Japan's Consortium for Advanced Semiconductor Materials and Related Technologies (CASMAT). Consortium members will use the RapidCure FC at CASMAT's Tokyo-based centre for the research and development of new and innovative spin-on dielectric films for a multitude of semiconductor-based applications.
"The development and integration of new semiconductor materials are critical to ensure that chipmakers achieve the performance goals of next generation devices," said Tadashi Toyoda, Axcelis' managing director for Japan."
UV curing is an enabling technology for next generation device development, allowing chipmakers to change or enhance the properties of materials used to build advanced transistor structures. RapidCure FC, for example, can be used to enhance the mechanical and electrical properties of both CVD-based and spin-on low-k films so they can be adopted for 45nm devices. The tool can also be used to repair transistors through UV annealing, improve transistor speed with silicon nitride film curing and remove charge build-up in advanced non-volatile memory devices.
