News Article
Entegris reaches milestone by surpassing 300th Aeronex System installation
Entegris Inc. has reached an important industry milestone. The company recently surpassed its 300th Aeronex Gas Purification System installation.;;
Entegris Inc. has reached an important industry milestone. The company recently surpassed its 300th Aeronex Gas Purification System installation.
"The industry has been clamouring for an alternative to conventional gas purification systems that can cause process variability, reduce yield and shorten tool life," said Patrick McKinney, vice president and general manager, microenvironments, Entegris. "Semiconductor manufacturers are recognizing the benefits of reducing total cost of ownership and achieving continuous pure gas supply by deploying Aeronex systems. It's a clear, compelling alternative to legacy methods."
