News Article
Advanced technologies improve high vacuum in discrete MEMS Packages
The SAES Getters Group, recognizes SST International’s Model 3150
MEMS sealing furnace for integration with its proprietary getter thin film
PageLid , designed to maintain vacuum or contamination-free environments in discrete MEMS hermetic packages.
The SAES Getters Group, recognizes SST International’s Model 3150
MEMS sealing furnace for integration with its proprietary getter thin film
PageLid , designed to maintain vacuum or contamination-free environments in discrete MEMS hermetic packages.
As a result of continuous process optimization, SST recently upgraded the Model 3150 High Vacuum Furnace to offer MEMS manufacturers the option to separate the critical steps of getter activation and hermetic sealing of discrete MEMS packages, thus preserving the unaltered vacuum absorbing capacity of the getter material in the packages. Before package sealing, a proprietary high temperature process is devoted to getter activation.
"SAES Getters is extremely pleased to welcome this integration between its PageLid and SST’s Model 3150 furnace”, says Marco Moraja, Getters for MEMS Business Development Area Manager at the SAES Getters Group.
“This equipment is fully compatible with the activation and operation conditions of our getters, as testified already by the major discrete MEMS package manufacturers worldwide, who select SAES-SST integrated solutions to boost their product performance”, concluded Mr. Moraja.
SST International’s President, David Muhs adds: “SST’s engineering team recognized the stringent process requirements for optimum getter activation and MEMS package performance and developed solutions to address these needs. We work closely with MEMS packaging engineers and SAES Getters Group to insure that each different packaging need is address with the best combination of materials, equipment and processes.”
