Metryx receives mass metrology production tool order
Metryx, Limited announced that a US-based GaAs volume manufacturer of SAW and BAW devices for the communications industry has placed an order for the company's Mentor OC23 Mass Metrology system. The GaAs manufacturer plans to use the OC23 in a volume production, measuring both deposition and etch processes on product wafers.
The order highlights the broad range of applications where mass metrology can be implemented to monitor and characterize processes. Metryx technology can be used to monitor product wafers in volume production environments for dielectric and conducting materials in etch, deposition and CMP process applications.
"We continue to see increasing interest in our mass metrology systems from a wide variety of manufacturers," stated Dr. Adrian Kiermasz, President and CEO of Metryx. "Because the Mentor offers a non-interfering in-line approach and is not dependant on the substrate, it can be implemented across the full spectrum of manufacturing technologies. By allowing manufacturers to identify changes in process performance on a wafer-to-wafer basis, any potential issues can be quickly addressed to save considerable time and money."
