Tegal receives order for 6500 advanced etch system from Skyworks Solutions, Inc.
Tegal Corporation has announced that it had received an order for an 6500 Advanced Etch cluster tool from Skyworks Solutions Inc. The system will be shipped to Skyworks' fab in Southern California and will be used to etch SiN and other critical thin-films on GaAs substrates. The devices produced on the 6500 system will be incorporated in a wide variety of wireless handset, automotive, broadband, cellular infrastructure, industrial and medical applications.
"The 6500 Advanced Etch system was selected on the basis of its capabilities," said Thomas Mika, President & CEO of Tegal Corporation. "A key focus area for our company is the compound semiconductor space, which is seeing renewed growth due to the ubiquitous usage of wireless electronics."
