News Article
Axcelis Technologies, Inc. has shipped its new single wafer
Axcelis Technologies, Inc. has shipped its new single wafer Optima HD high dose implant system to a major chipmaker in Europe.
Axcelis Technologies, Inc. has shipped its new single wafer Optima HD high dose implant system to a major chipmaker in Europe.
“Customers continue to be very excited about the productivity and technological advantages delivered by the Optima HD,” said Mary Puma, chairman and CEO of Axcelis. “The Optima HD offers flexibility in performing implants for both traditional and future device manufacturing trends – including molecular implants for dual poly gate and advanced source drain extension applications as well as hydrogen for SOI applications. We’re pleased to build on our relationship with this customer, as they realize the benefits of the Optima platform.”
