Axcelis secures order from Major Asian memory manufacturer
Axcelis Technologies, Inc. announced that it has received an order from a top memory manufacturer for its Optima HD Imax molecular implanter. Following on the customer's previous order last year for Axcelis' standard Optima HD high dose implanter, the new Optima HD Imax will enable them to increase productivity by implanting clusters of boron rather than individual atoms. The tool was selected specifically for its ability to perform high dose, dual poly gate implants and other advanced applications on DRAM devices. The system is expected to ship this month.
"This order is very significant, serving as clear validation for our Optima HD platform while demonstrating customer confidence in this molecular implanter," said Mary Puma, chairman and CEO of Axcelis. "The Optima HD Imax provides effective throughput because it delivers high beam current performance at low energy with zero contamination."
