SEMEFAB selects memsstar for advanced MEMS processing
As a key part of its new 150mm MEMS foundry, Semefab has selected memsstar systems as the preferred solution for advanced release etching. After extensive evaluation Semefab has purchased the latest memsstar SVR system for dry release etch of advanced structures, and will offer its customers capability for the fabrication of devices including membranes, cantilevers, channels and microbridges.
With its Controlled Continuous Flow Technology – CCFT – memsstar will enable SEMEFAB to develop and manufacture dry process flows on a wafer scale while achieving cost effective yields with leading manufacturing and process controls. Semefab is presently investing in both a fab expansion and new fab build to fulfil its role as the UK MNT (Micro and Nano Technology) wafer fab node. The expanded fab 2, and the new build fab 3, are dedicated to MEMS and nanotechnology devices.
Ian McNaught, MEMS Business Manager said, "as Semefab executes its SemeMEMS strategy and fulfils its role as the UK Micro and Nanotechnology Network (MNT) wafer fab node I am confident that our newly acquired Memsstar SVR tool will add a valuable resource to our process technology capability. Semefab's fab 2 operations enable project progression through their feasibility, proof of concept, prototyping and volume life cycles. Semefab offers SMEs and academia a service, supporting both technology development cycles and volume manufacturing cycles under the UK MNT open access initiative"
