Axcelis wins major follow-on order for dry strip tools
Axcelis Technologies, Inc. has received a significant follow-on order for over 10 RadiantStrip 320 photoresist dry strip systems from a major memory device manufacturer. Designed for 300mm front-end-of-line cleaning applications, the dual-chamber systems will be used in the customer's fabs at multiple global sites supporting high-volume device production. The systems will begin to ship in the first quarter.
The RadiantStrip 320 has been adopted by customers worldwide for its ability to effectively address a wide range of post-implant and post-etch cleaning applications, including the fast, complete and uniform removal of heavily implanted photoresist.
"Our customer's order for multiple RadiantStrip 320 systems confirms our platform's long track record of reliability and process versatility in the most demanding environments," said Mary Puma, chairman and CEO of Axcelis. "It is ideally suited to their diverse production requirements, supporting multi-temperature stripping and heavily implanted photoresists. This ensures high productivity and compatibility with current and next-generation materials."