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Integration success for Vistec and TOOL

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Vistec Semiconductor Systems and TOOL Corporation have announced the integration of Vistec's SEM-based CD measurement system LWM9000 SEM and TOOL's layout visualization platform LAVIS.
Vistec Semiconductor Systems and TOOL Corporation have announced the integration of Vistec's SEM-based CD measurement system LWM9000 SEM and TOOL's layout visualization platform LAVIS. Through proprietary methodology of Vistec and TOOL, this integration made it possible to display the measuring layout design data on LAVIS and to visually create a recipe, a measurement information used in LWM9000 SEM, by simple mouse operations. The created recipes are directly readable by LWM9000 SEM, so that users can create high-quality recipes in a short amount of time without being concerned about recipe format. "We are very pleased with the collaboration with Vistec," said Hideaki Hontao, president of TOOL. "The integration of highly accurate CD measurement system LWM9000 SEM and multi-functional layout platform LAVIS provides our mutual customers with dramatic improvement in their measurement processes.""Collaboration with TOOL succeeded in every way," stated Gerhard Ruppik General Manager of Vistec Semiconductor Systems. "We are pleased to supply our customers with an innovative solution for upcoming technology nodes. "
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