News Article
Vistec receives first order for new IR infrared inspection microscope
Vistec Semiconductor Systems (previously Leica Microsystems Semiconductor) delivers two infrared inspection systems INM100 IR to an European MEMS manufacturer.
Vistec Semiconductor Systems (previously Leica Microsystems Semiconductor) delivers two infrared inspection systems INM100 IR to an European MEMS manufacturer.The customer will use one system each for production and defect analysis. Infrared microscopes offer the opportunity to see through Silicon layers. The high transparency of silicon in infrared light permits the detection of defects, which are not visible by any other illumination method. "Therefore, the usage of the INM100R is predestined for the MEMS production, especially when it comes to the inspection of Silicon-embedded structures", says the responsible product manager Andreas Machura. "We provide the customer an inspection system, developed and built with focus on the diversified customer's demands."The INM100 IR has an IR optimised illumination and optics. "The system also provides results in the infrared spectrum. It can be operated as a conventional microscope, too, which increases the value for the customer", adds Machura. The INM100 IR can also be used to control the quality of the overlay of flip chip and wafer level packaging technologies. The MEMS manufacturer made his decision to order two INM100 IR systems because of an on-site evaluation of Vistec microscopes. "The customer was convinced by the combined VIS and IR illumination, which can be used for surface and see-through inspections, explains Vistec's General Manager Gerhard Ruppik. "Another decisive factor for the order of the INM100 IR systems was the excellent infrared optics."
