Spray coater from SUSS MicroTec selected for pressure sensor production
Grundfos, a full-line supplier of pump technology located in Denmark, has purchased, installed and qualified a fully automated Gamma AltaSpray coating cluster from SUSS MicroTec for production of Grundfos pressure sensors, which are used in its pump solutions.
With the AltaSpray approach SUSS MicroTec has developed a revolutionary spray coating technology, that delivers consistent conformal coatings over various structures such as 90 degree corners, KOH etched cavities, V-grooves or lenses. SUSS AltaSpray systems are capable of achieving uniform photoresist coatings on sidewall slopes from 0 to 90 degree and even on re-entrant profiles.
"Grundfos is a pump manufacturer who produces its own range of pressure and flow sensors for the harsh environments usually found in pump systems" said Grundfos officials. "Grundfos sensors help to optimize the performance and lower the energy consumption of the pumps and pump systems. For these applications we were looking for advanced wafer coating equipment, which is able to meet our most demanding process requirements. We were impressed by the ability of the SUSS Spray Coater to reliably cover steep sidewalls and sharp topography edges found on our structures."
"With the AltaSpray technology we have developed a dedicated technology for the fabrication of 3-D microstructures that are especially used in the field of MEMS and advanced packaging", comments Rolf Wolf, General Manager, SUSS MicroTec's Lithography Division. "Since the launch of this technology three years ago we have managed to implement AltaSpray as the tool of choice for high topography applications. This order from Grundfos is a perfect example of SUSS Altaspray technology being established in volume production."
