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Fab energy conservation initiates standard for green-fabs of the future

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Members of the International SEMATECH Manufacturing Initiative (ISMI) have agreed to draft a "green fab standard" aimed at building semiconductor factories that will use less energy and water, minimise waste and air pollution, and ultimately save money for chip-makers.

Members of the International SEMATECH Manufacturing Initiative (ISMI) have agreed to draft a "green fab standard" aimed at building semiconductor factories that will use less energy and water, minimise waste and air pollution, and ultimately save money for chip-makers.

Simultaneously, ISMI members have compiled a set of best practices and tactics for conserving energy in current factories, using activities as simple as turning down tool exhaust fans, and as complex as writing software to automatically control equipment pumps. Potential cost reductions from these refinements are significant: a typical fab can save at least $100,000 per year for each 1 percent reduction in energy consumption.

Both initiatives stemmed from ISMI's Green Fab Workshop and Fab Energy Conservation Workshop, held recently. The two meetings brought together industry manufacturers and suppliers in a concentrated effort to drive environmental learning into current chip factories, while defining the requirements for building eco-friendly fabs in the 21st century.

"Being ‘green' in terms of products, processes, and facilities is mandatory for any industry that wants to thrive in our current environment," said Scott Kramer, ISMI director. "Chip-makers recognise that eco-friendly manufacturing is a clearly established part of corporate responsibility – something that is expected by investors, customers, and communities around the world."

At the Green Fab Workshop, representatives from universities and the fab design and construction industry joined ISMI members in comparing current best practices for sustainable fabs to guidelines in the Leadership in Energy and Engineering Design (LEED) rating system established by the U.S. Green Building Council.

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