News Article
New order received for aluminium nitride deposition system from U.S. University
Tegal Corporation has announced that it has received an order for a Tegal AMS SMT AlN PVD tool from the University of Pennsylvania.
Tegal Corporation has announced that it has received an order for a Tegal AMS SMT AlN PVD tool from the University of Pennsylvania. The Tegal AMS SMT system will be installed in the University of Pennsylvania Wolf Nanofabrication Laboratory, where it will be used by Professor Gianluca Piazza and his group for research on piezoelectric micro and nano systems (MEMS/NEMS) for the realization of next-generation RF Wireless Communication, Biological Detection, Wireless Sensor Platform, and Medical Ultrasound applications.According to Professor Piazza, "We think we've found the best fit, with this small footprint tool, to meet our laboratory needs for reliably depositing highly oriented piezoelectric aluminum nitride films. We are confident our research work with these AlN films will produce enabling technology for the realization of new classes of micro and nanomechanical resonators, filters, switches and precision actuators. These AlN-based devices have applications in several different areas, such as analogue frequency processing, mechanical computing, and biochemical sensing."
