News Article
Project targets next-generation MEMS to establish new performance benchmarks
Tronics Microsystems and Alcatel Micro Machining Systems has announced a joint development project (JDP) on DRIE for extreme-performance MEMS.
Tronics Microsystems and Alcatel Micro Machining Systems has announced a joint development project (JDP) on DRIE for extreme-performance MEMS.The collaboration will leverage the companies' complementary strengths to develop next-generation advanced DRIE process technology for high-performance MEMS and to establish a new performance benchmark for the MEMS industry. Tronics has developed test tools and methodologies for tracking process-failure modes and has established precise statistical process control (SPC) indicators for MEMS production. Tronics will utilize its robust test protocols to evaluate and qualify new, advanced DRIE manufacturing processes from AMMS, and will provide SPC feed-back. With that data, AMMS will build on its DRIE by further enhancing its process solutions for new, advanced high-aspect-ratio, high-yield and manufacturing-proven processes. In return, Tronics will receive priority access to the company's latest process modules and quality services."We are constantly working to improve our process capabilities. It is a great opportunity for us to benefit from Tronics' manufacturing experience in high- performance SOI-based inertial transducers and 3D packaging to qualify our future DRIE process modules with them," said Jean-Marc Gruffat, director of products at AMMS. "Our goal is to push the limits of high-aspect-ratio DRIE processes with high- accuracy controlled profile, excellent uniformity and reproducibility in order to provide our customers manufacturing-proven and high-yield DRIE production tools for next-generation MEMS and 3D semiconductors.""With this extension of our long-running relationship with AMMS we are committing to provide our customers with the latest process solutions for their extreme- performance products," said Dr. Stéphane Renard, Tronics' director of research and advanced technologies. "This partnership marks a major milestone in strengthening our technological and market position in manufacturing custom products for demanding applications."The development project will take advantage of Tronics' productization expertise and proven track record in manufacturing and supplying custom MEMS transducers, such as MEMS geophones for the seismic oil exploration industry, miniature SMD accelerometers for cardiac-rhythm management and, more recently, in developing custom MEMS gyros transducers for aerospace and automotive customers.
