News Article
Logic manufacturer places orders for automated macro defect inspection systems
Vistec Semiconductor Systems received multiple orders for its LDS3300 C macro inspection system from a leading logic manufacturer. The customer will use the systems in a 300 mm wafer fab for inspection and review of wafers in 65 nm production.
Vistec Semiconductor Systems received multiple orders for its LDS3300 C macro inspection system from a leading logic manufacturer. The customer will use the systems in a 300 mm wafer fab for inspection and review of wafers in 65 nm production.The first order for multiple automated macro defect inspection systems Vistec LDS3300 C has already been posted, worth about 2.3 million US-Dollar. Further orders are scheduled. The systems will be delivered over a period of one year.According to Gerhard Ruppik, General Manager of Vistec Semiconductor Systems, "The system offers automated defect inspection for the entire wafer surface including frontside, backside and edge/bevel/apex as well as the integrated review capability offering high optical performance in the UV and Deep UV mode."
