News Article
New epitaxy reactor to be installed at university in China
AIXTRON has announced that the successful installation of a Thomas Swan epitaxy reactor at the South China Normal University (SCNU), Guangzhou, China.
AIXTRON has announced that the successful installation of a Thomas Swan epitaxy reactor at the South China Normal University (SCNU), Guangzhou, China. SCNU represents the first user for the latest Thomas Swan CCSTM 3x2" FT MOCVD system in Mainland China. The 3x2" FT Close Coupled Showerhead (CCSTM) metal-organic chemical vapour deposition (MOCVD) system will be used to develop material structures for high brightness LEDs based on gallium nitride (GaN). It is now operated in the Guangzhou LED research and development centre at the South China Normal University. One of China's pioneers of MOCVD, Prof. Fan Guang-Han, Director of the MOCVD Laboratory at SCNU, began MOCVD research in China twenty four years ago. "I am very much looking forward to working with the new reactor. It will make an enormous contribution to our nitride research. The Thomas Swan CCSTM reactors are adaptable to nitride LED process development. With their excellent uniformity and the responsive support from AIXTRON I am convinced that this is the best MOCVD tool for our requirements."
