News Article
Bosch increases MEMS etch capacity
Robert Bosch GmbH has purchased an Omega fxP etch system from Aviza Technology, for deep silicon etch processes required in its MEMS device manufacturing.
Robert Bosch GmbH has purchased an Omega fxP etch system from Aviza Technology, for deep silicon etch processes required in its MEMS device manufacturing. This is Aviza's second MEMS customer-win to be announced in the last three months.
"The Bosch name is synonymous in the industry with deep silicon etch technology. We couldn't be more proud to be chosen as a key etch equipment supplier for their future technology development and production needs," said Kevin Crofton, Vice President and General Manager, PVD/CVD/Etch Business Unit of Aviza Technology, Inc.
