Aquest Systems receives patent on revolutionary FabEX automated material handling system
The first of a series of patents currently pending in the U.S. and internationally, patent number 7,281,623 was issued and assigned to Aquest Systems on 16 October and includes 36 claims surrounding Aquest's FabEX AMHS technology. Specifically, the patented technology concerns FabEX AMHS's ability to transport wafer containers via front opening unified pods (FOUPs) at high speeds (>3 meters/second) throughout a semiconductor fab. It also allows the FabEX system to move FOUPs around curves and ramps while minimising moving parts and vibrations to increase system reliability.
Commenting on the technology patent, Aquest's chief engineer and principal inventor, Barry Kitazumi, noted, "Aquest's unique FabEX technology has enabled us to produce a system that far exceeds the speed and capacity of other systems in the market. As a result, we are committed to protecting our technology prowess, taking the steps necessary to preserve the integrity of our intellectual property."
In addition to the recently issued patent, Aquest has more than a dozen other patents pending, both in the United States and internationally, focused on protecting FabEX's unique capabilities. These include reducing delivery time, increasing transport capacity, easing installation, and ensuring maintainability and flexibility.
