News Article
AIXTRON AG buys mapping system from Nanometrics
Nanometrics Incorporated, a supplier of advanced metrology equipment to the semiconductor industry, has announced that AIXTRON AG, a provider of deposition tools used in the worldwide production of advanced components for electronic and opto-electronic applications, has purchased the Nanometrics VerteX photoluminescence (PL) mapping system to determine material composition, measure layer thickness and improve the wafer uniformity performance of its equipment.
AIXTRON manufactures metal organic chemical vapour deposition (MOCVD) equipment, a key processing tool used to produce high-brightness light-emitting diodes (HBLEDs). The Nanometrics VerteX is expected to be installed during the fourth quarter of 2007 at AIXTRON’s Aachen, Germany demonstration facility.
AIXTRON will replace its current PL mapping tool, Nanometrics’ RPM2000, with the VerteX in order to obtain greater execution for its deposition systems and processes.
