University ready to produce Carbon Nanotubes on AIXTRON CVD system
The new equipment combines both thermal CVD and plasma enhanced CVD in a single platform. This will be used for the development of carbon nanotube-based field effect transistors, vacuum electronic devices and sensor technology.
AIXTRON is a supplier of Chemical Vapour Deposition (CVD), Atomic Vapour Deposition (AVD) and Atomic Layer Deposition (ALD) equipment to the semiconductor industry. The recently established AIXTRON Nanoinstruments business unit is focused on the Nanotechnology market through the manufacture of plasma enhanced CVD systems for carbon nanotubes and other nanomaterials. CNT is a promising material for many future optical and electronic devices and applications and is currently being investigated by many research groups as a material to be used in flat panel displays, heat sinks and integrated circuits.
