News Article
SEMI announces four new standards
New specifications cover FPD, MEMS and semiconductor industries to address critical manufacturing challenges
SEMI has published four new technical standards applicable to the flat panel display (FPD), MEMS and semiconductor manufacturing industries. The new standards, developed by technical experts from equipment and materials suppliers, device manufacturers and other companies participating in the SEMI International Standards Programme, are available from SEMI now.
SEMI Standards are published three times a year. The new standards, part of the July 2008 publication cycle, join more than 770 standards that have been published by SEMI during the past 35 years.
“These SEMI Standards represent a continuation of the work undertaken by the volunteers in the SEMI International Standards Program,” said James Amano, director, SEMI International Standards. “The four new specifications provide critical solutions to manufacturing challenges in the FPD, MEMS and semiconductor industries.”
The full list of SEMI standards being released include:
SEMI D53-0708: Specification for Liquid Crystal Display (LCD) Pellicles;
SEMI D52-0708: Specification for Reference Position of Substrate ID;
SEMI MS7-0708: Specification for Microfluidic Interfaces to Electronic Device; Packages;
SEMI T19-0708: Specification for Device Marking.
The SEMI Standards Programme, established in 1973, covers all aspects of semiconductor process equipment and materials, from wafer manufacturing to test, assembly and packaging, in addition to the manufacture of flat panel displays, photovoltaic systems and micro electromechanical systems (MEMS). About 1,650 volunteers worldwide participate in the programme, which is made up of 18 global technical committees.
Following is more detailed information about the new SEMI standards.
SEMI D53-0708 Specification for Liquid Crystal Display (LCD) pellicles:
The SEMI D53-0708 standard defines the standard stand off, transmittance, and strength
of pellicle films for FPD masks. Dimensions apply to pellicle for masks that are principally used in fabricating liquid crystal displays. This standard is beneficial to standardise the pellicle size from 330 x 450mm to 1220 x 1400mm.
SEMI D52-0708 Specification for Reference Position of Substrate ID:
The SEMI D52-0708 standard applies to traceability for manufacturing FPDs. As the sizes of mother glass in TV manufacturing become larger, a need arises for efficient identification of substrate IDs during transportation to enable process control, which is an important element of product quality management. By standardising the substrate ID positioning with 2D Code specification, ID reading position can be determined. This standard enables users and AMHS manufactures to reduce their confirmation work for the substrate ID positioning readout and allows AMHS manufactures to reduce the amount of design work, as well as reducing the workload for installation and adjustment of reader units in the field. In addition, reading accuracy, which is an important element of traceability, is expected to be improved as a result of the standardisation of the substrate ID positioning.
SEMI MS7-0708 Specification for Microfluidic Interfaces to Electronic Device Packages:
The SEMI MS7-0708 standard is applicable to the MEMS category of microfluidics and addresses the demand of open standards where combinations of microfluidic and microelectronic function are integrated and fluids need to be isolated then delivered to and/or from the larger millimetre scale. Manufacturers of combined microfluidics and microelectronics have customised components and interfaces, resulting in increased cost, incompatible architectures, and longer development times. Compliance with this standard can be in one or all of four parts as specified. The specification describes the connection attributes and specifies the interface dimensions required to design and build devices and systems that are compliant with this standard. SEMI MS7-0708 is expected to provide device users adequate room for product versatility and market differentiation without the burden of carrying obsolete interfaces, losing compatibility, and choice.
SEMI T19-0708 Specification for Device Marking:
The SEMI T19-0708 standard establishes a standard specification for marking of semiconductor devices to identify individual devices by a unique identification code. It also provides optional information as part of the overall manufacturing information. The specification document ranges from bare semiconductor dice to be packaged up to complete assembled devices. While the document specifies the physical interface of marking depending on one or more available technologies, it does not restrict specific means of writing, reading alignment and so on. The document also covers a part of the logical interface regarding the information of the marking. However, the document does not specify specific means to mark (write) nor to identify (read) the mark.
SEMI Standards are published three times a year. The new standards, part of the July 2008 publication cycle, join more than 770 standards that have been published by SEMI during the past 35 years.
“These SEMI Standards represent a continuation of the work undertaken by the volunteers in the SEMI International Standards Program,” said James Amano, director, SEMI International Standards. “The four new specifications provide critical solutions to manufacturing challenges in the FPD, MEMS and semiconductor industries.”
The full list of SEMI standards being released include:
SEMI D53-0708: Specification for Liquid Crystal Display (LCD) Pellicles;
SEMI D52-0708: Specification for Reference Position of Substrate ID;
SEMI MS7-0708: Specification for Microfluidic Interfaces to Electronic Device; Packages;
SEMI T19-0708: Specification for Device Marking.
The SEMI Standards Programme, established in 1973, covers all aspects of semiconductor process equipment and materials, from wafer manufacturing to test, assembly and packaging, in addition to the manufacture of flat panel displays, photovoltaic systems and micro electromechanical systems (MEMS). About 1,650 volunteers worldwide participate in the programme, which is made up of 18 global technical committees.
Following is more detailed information about the new SEMI standards.
SEMI D53-0708 Specification for Liquid Crystal Display (LCD) pellicles:
The SEMI D53-0708 standard defines the standard stand off, transmittance, and strength
of pellicle films for FPD masks. Dimensions apply to pellicle for masks that are principally used in fabricating liquid crystal displays. This standard is beneficial to standardise the pellicle size from 330 x 450mm to 1220 x 1400mm.
SEMI D52-0708 Specification for Reference Position of Substrate ID:
The SEMI D52-0708 standard applies to traceability for manufacturing FPDs. As the sizes of mother glass in TV manufacturing become larger, a need arises for efficient identification of substrate IDs during transportation to enable process control, which is an important element of product quality management. By standardising the substrate ID positioning with 2D Code specification, ID reading position can be determined. This standard enables users and AMHS manufactures to reduce their confirmation work for the substrate ID positioning readout and allows AMHS manufactures to reduce the amount of design work, as well as reducing the workload for installation and adjustment of reader units in the field. In addition, reading accuracy, which is an important element of traceability, is expected to be improved as a result of the standardisation of the substrate ID positioning.
SEMI MS7-0708 Specification for Microfluidic Interfaces to Electronic Device Packages:
The SEMI MS7-0708 standard is applicable to the MEMS category of microfluidics and addresses the demand of open standards where combinations of microfluidic and microelectronic function are integrated and fluids need to be isolated then delivered to and/or from the larger millimetre scale. Manufacturers of combined microfluidics and microelectronics have customised components and interfaces, resulting in increased cost, incompatible architectures, and longer development times. Compliance with this standard can be in one or all of four parts as specified. The specification describes the connection attributes and specifies the interface dimensions required to design and build devices and systems that are compliant with this standard. SEMI MS7-0708 is expected to provide device users adequate room for product versatility and market differentiation without the burden of carrying obsolete interfaces, losing compatibility, and choice.
SEMI T19-0708 Specification for Device Marking:
The SEMI T19-0708 standard establishes a standard specification for marking of semiconductor devices to identify individual devices by a unique identification code. It also provides optional information as part of the overall manufacturing information. The specification document ranges from bare semiconductor dice to be packaged up to complete assembled devices. While the document specifies the physical interface of marking depending on one or more available technologies, it does not restrict specific means of writing, reading alignment and so on. The document also covers a part of the logical interface regarding the information of the marking. However, the document does not specify specific means to mark (write) nor to identify (read) the mark.
