News Article
Lithography
Wafer carrier evolved
Entegris has a long history within the semiconductor industry beginning as a supplier of wafer carriers. The company has evolved along with the industry and is now a specialist in a range of areas. David Ridsdale from EuroAsia Semiconductor asked Entegris to expand on their evolving state and explain how they are intending to tackle the increasingly difficult challenge of reticle haze.
Entegris has a long history within the semiconductor industry beginning as a supplier of wafer carriers. The company has evolved along with the industry and is now a specialist in a range of areas. David Ridsdale from EuroAsia Semiconductor asked Entegris to expand on their evolving state and explain how they are intending to tackle the increasingly difficult challenge of reticle haze.
Download article in pdf - http://www.euroasiasemiconductor.com/euroasia-magazine/online-june2008/entegris.pdf
