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Carrier Wafers Enable Handling Of Smaller Diameter Wafers

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Plan Optik AG offers Carrier Wafers which enable handling of smaller diameter wafers and a variety of substrates with different dimensions.

With increasing diameter of wafers processed in semiconductor industry not everyone can afford processing equipment or tools for different wafer diameter or even customized substrate dimensions.

Plan Optik"˜s Adapter Carriers feature pockets to hold smaller dimension substrates or wafers with smaller diameter and carry them through the process - giving you the ability to handle and process a variety of different wafer and substrate sizes - on your existing equipment.

Adapter Carriers are either mono crystalline surface processed Silicon wafers with patterned pocket(s) or Silicon wafers permanently bonded to borosilicate glass rings that have been patterned according to the dimensions of substrate. The so formed pockets on the wafer with your standard outer diameter enables processing of smaller wafers and substrates as for example 150 mm wafers on 200 mm equipment or even multiple 2" wafers on 100 mm tools.

Due to the materials used, these carriers can be used in operating temperatures up to 500°C (~930°F) max. In addition holes or grooves can be added to be able to use Plan Optik Adapter Carriers with process types as for example vacuum mounting.In order to guarantee the highest quality, Plan Optik employs a quality management system certified as per IATF 16949, ISO 14001 and ISO 9001.



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