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GEN20-Q MBE system for quantum applications


Veeco Instruments has shipped a GEN20-Q Molecular Beam Epitaxy (MBE) system to Hermes-Epitek, a semiconductor and opto-electronics client based in the Hsinchu Science Park in Taiwan.

The GEN20-Q MBE system, a purpose-built, multi-chamber system designed for the growth of quantum devices, will be used for the epitaxial growth of superconductor and semiconductor materials, which exhibits excellent crystalline and superconducting properties. This process capability will further advance key device characteristics and enable the scaling from research development to high-volume production.

“This GEN20-Q system shipment represents Veeco’s continued contribution to revolutionizing quantum computing technologies,” commented Matthew Marek, Senior Director of Marketing for Veeco’s MBE Group. “We are proud that leading technology companies recognize the knowledge and process capabilities we have here to support quantum technologies with not only MBE platforms but also atomic layer deposition. These are essential technologies that will help drive industry progress. We look forward to continued innovations with partners like Hermes-Epitek.”

Investment in quantum technologies has surpassed $30 billion with about 75 percent of that amount going to quantum computing hardware according to the Quantum Technologies 2023 report published by Yole Group.

Veeco’s GEN20-Q MBE system utilizes a tailored design to support research and production of multiple quantum computing techniques including superconductive materials, spintronics, and high-speed optical modulation. The system incorporates production design technology allowing direct scalability to Veeco’s multi-wafer high-volume manufacturing MBE systems. This system shipment exemplifies Veeco’s success in building a network of quantum computing partners aimed at advancing quantum technologies. Veeco is proud to be at the forefront of these exciting developments and is excited to continue working with its partners to drive the industry forward.

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