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New Wooptix Poster at SPIE Advanced Lithography and Patterning

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Jan O. Gaudestad will present the Poster “A new optical metrology technique for measuring the shape of a lithography photomask”.

SPIE Advanced Lithography and Patterning Conference, taking place between February 25th and February 28th in San Jose (California), will attract attention from the entire semiconductor lithography and metrology industry. Its lineup of speakers are world-class leaders such as Anne Kelleher from Intel Corp, Todd Younkin from Semiconductor Research Corporation, and Chan Hwang from Samsung.

As part of this significant event, Wooptix will present a poster titled "New optical metrology technique for measuring the shape of a lithography photomask." The presentation will take place on the 28th at 5:30 PM in the Convention Center, Hall 2.

Jan O. Gaudestad, VP Business Development Manager, states: "Wafer overlay errors due to non-flatness and thickness variations of a mask need to be minimized to achieve good on-product overlay (OPO). Due to the impact on overlay errors inherent in all reflective lithography systems, EUV reticles will need to adhere to flatness specifications below 10nm, values which are nearly impossible to meet using current tooling infrastructure with current state-of-the-art reticles reporting Peak-to-Valley (PV) flatness of around 60nm²."

Through Wooptix' poster, "We introduce a new technique, called Wave Front Phase Imaging (WFPI), that will generate a shape map with 810 thousand data points on an 86.4mm× 86.4mm area on an optical photomask with 96µm spatial resolution with a total data acquisition time of 14 seconds," Gaudestad emphasizes.

The team involved in the paper includes Guillermo Castro, Miguel Jiménez, Kiril Ivanov, Juan M. Trujillo, José Manuel Rodríguez Ramos, and Jan Olaf Gaudestad, who is also the presenter that day.

Jan O. Gaudestad is based in San Francisco, US, and is responsible of the VP of Business Development for Wooptix. Before Wooptix, he was Director of BD at a VR startup and prior he worked on strategic accounts for motion sensors at InvenSense/TDK. He spent 14 years at Neocera, a backend semiconductor equipment maker where he was part of the team raising $13 million in 2002 to commercialize his graduate research work.

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