+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
 
Loading...
Vendor View

High-Purity Hydrazine Gas Delivery System

News

Taiyo Nippon Sanso Corporation, a Japanese industrial gas company in Nippon Sanso Holdings Group, has developed a gas delivery system for high-purity hydrazine, compatible with RASIRC’s 1 BRUTE® Hydrazine.

In the electronic device manufacturing industry, hydrazine gas is favored for its superior reactivity over conventional nitriding sources, such as ammonia. This advantage facilitates the reduction of temperatures in the semiconductor manufacturing process, enhances film quality, and improves throughput. Such advancements are crucial for miniaturizing advanced logic semiconductors and increasing the storage capacity of memory 2

TNSC offers RASIRC’s BRUTE® Hydrazine as a high-purity material specifically for semiconductor 3 BRUTE® Hydrazine, prepared by blending anhydrous hydrazine with a unique organic solvent stabilizer from RASIRC, significantly boosts safety. While high-purity hydrazine gas has attracted attention as an emerging specialty gas for semiconductor manufacturing, a system that can deliver this gas via a concentrated and stable method has not been developed. Given the necessity for consistent delivery of such specialty gases in semiconductor production processes, the availability of a dedicated delivery system has become crucial.

Therefore, leveraging their proprietary gas handling technology, TNSC has pioneered the development of a gas delivery system capable of safely and reliably delivering high-purity hydrazine gas tailored to semiconductor manufacturing processes.

System Overview

The features of the high-purity hydrazine gas delivery system are as follows:

✓ A BRUTE® Hydrazine vessel is securely housed within the gas delivery cabinet, facilitating the safe and stable delivery of a nitrogen/hydrazine gas mixture ).

✓ The system includes an integrated monitoring feature that continuously tracks the remaining amount of BRUTE® Hydrazine gas, ensuring uninterrupted delivery.

Vessel replacement is streamlined through an automated sequence, allowing for safe and easy maintenance without exposing the hydrazine gas.

✓ The interior of the gas delivery cabinet is maintained under continuous negative pressure to swiftly evacuate any potential gas leaks from the BRUTE® Hydrazine cabinet or internal piping through the exhaust duct, thereby preventing disasters.

✓ In case of hazardous conditions, the system is equipped with a safety feature that triggers an alarm and automatically ceases operation to ensure safety.

Figure 1. High-purity hydrazine delivery system (exterior)

High-Purity Hydrazine Gas Delivery System
ASML’s affordable housing program kicks off
Saxony-Anhalt embraces change as an opportunity
Illinois Governor JB Pritzker announces historic $500 million investment
Rinchem opens chemical warehouse in Surprise, Arizona
PSoC Automotive 4100S Max supports fifth generation CAPSENSE technology
$25 million for workforce development initiatives
Mitsubishi Electric to release 6.5W silicon RF high-power MOSFET samples
Pentagon Technologies to build semiconductor equipment cleaning facility in Mesa
Renesas unveils single-chip RZ/V2H MPU
Infineon unveils high density power modules
Tenstorrent selected to help build Japan's AI future
FPT and Siemens ink MOU
Siemens joins Semiconductor Education Alliance
Rolls-Royce supplies mtu Kinetic PowerPacks for semiconductor manufacturer X-FAB Sarawak
Infineon enhances the TRAVEO T2G MCU family
Alps Alpine commences external sales of ICs
Samsung and Nova publish joint research
Edgewater Wireless selected to join the Alliance of Semiconductor Innovation Canada
Powerchip to work with Tata Group
Outsourcing facility for India
GigaDevice signs distribution agreement with EKOM
EU Consortium accepting Edge-AI design proposals
Airspace expands presence in Asia
IntraAction unveils AOD for Advanced EUV applications
Tata Group to build India’s first indigenous facility in Assam
Taiwan Semiconductor introduces 400V/600V ESD Withstand-Capable Rectifiers
Infineon introduces new Solid-State Isolators
Nexperia broadens its range of discrete FET solutions at APEC 2024
Imec presents levers to reduce the CO2 equivalent footprint of lithography and etch
Imec demonstrates readiness of the High-NA EUV patterning ecosystem
Infineon reorganizes sales and marketing
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: