Advanced Energy introduces power and measurement solutions
Enabling plasma, high-voltage, temperature measurement and control platforms for next-generation semiconductor and industrial processes.
Advanced Energy Industries will give SEMICON® West 2024 visitors the chance to see new technologies advancing semiconductor manufacturing in the ‘Angstrom Era’.
During SEMICON West, which takes place from July 9-11 at San Francisco’s Moscone Convention Center, Advanced Energy will further expand on the theme of ‘Advancing the Angstrom Era’ by demonstrating its latest plasma power, high-voltage and critical temperature measurement and control technologies. The company’s booth will also showcase new, modular platforms that meet demands for high power, high efficiency and power density AC-DC solutions across semiconductor processing and test equipment.
“Semiconductor fabrication is dramatically increasing in complexity as companies race to deliver ever smaller and more sophisticated devices requiring the most advanced manufacturing technologies,” said Juergen Braun, Advanced Energy’s senior vice president of Plasma Power. “At SEMICON West, Advanced Energy will showcase the platforms and tools needed for precision power control and measurement in demanding environments where innovation below the nanometer scale is a key requirement.”
Among the plasma power technologies at the Advanced Energy booth, #939, will be the company’s eVerest™ RF generator, the new NavX™ ultra-fast impedance matching network, the eVoS™ ME bias solution and the latest MAXstream™ high performance plasma sources for chamber-clean and on-wafer applications.
There will also be a live demonstration of a high-voltage electrostatic chuck. Critical temperature measurement and control technologies on display will include AE’s next generation pyrometry solution for enhanced measurement accuracy in semiconductor processes. The iHP industrial high-power, modular air-cooled and liquid-cooled platforms are designed to be rapidly configurable for a wide range of AC-DC conversion applications in semiconductor equipment.
Advanced Energy will also demonstrate how its PowerInsight by Advanced Energy® IoT platform can work with various plasma power platforms to bring actionable intelligence and power-delivery insights to critical semiconductor manufacturing processes.
