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Full Range Of Dry Roots Process Pumps For Harsh Duty Applications (XN Series)


New XN models feature :

- Advanced materials for full corrosion resistance

- New integrated options for increased pump health monitoring capabilities and extending pump service intervals

- Extended process lifetime

- Low power consumption

A 3004: The new standard for 3000 m3/h pumping speed - CVD Applications - Highest performance at the lowest operating cost

On the most advanced CVD applications, the A 3004 pump offers the best compression ratio under process flow operation for a wider process window.

Customer benefits

§ Better Tool uptime

o High MTBF

o Full corrosion resistant materials

o Wide operating temperature range

o Integrated hot N2 injection prevents exhaust clogging

§ Savings

o Low power consumption

o Low cost of ownershi

o High efficiency motors

o Optimized electrical heaters

§ Intelligent

o Extended monitoring functionalities provide better control of pump conditions (water sensor, vibration box)

§ IP33, Semi S2 and UL compliant


  • Semiconductor industry (Etch, PECVD, SACVD, ALD, ...)
  • Coating industry: Displays, Photovoltaic & LED

Pfeiffer Vacuum

Nashua, NH

Tel: 1-603-578-6500



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AngelTech Live III was broadcast live on 12 April 2021, 10am BST, rebroadcast on 14 April (10am CTT) and 16 April (10am PST) and features online versions of the market-leading physical events: CS International and PIC International PLUS a brand new Silicon Semiconductor International Track!

The event covered the whole spectrum of key developments affecting the compound semiconductor industry. Over the last few months interest in deep-UV LEDs has rocketed, due to its capability to disinfect and sanitise areas and combat Covid-19. This was considered a roadmap for this device, along with technologies for boosting its output.

With 3 interactive sessions over 1 day AngelTech Live III proved to be a key event across the semiconductor and photonic integrated circuits calendar.

So make sure you sign up today and discover the latest cutting edge developments across the compound semiconductor and integrated photonics value chain.


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