Full range of dry Roots process pumps for harsh duty applications (XN series)
New XN models feature :
- Advanced materials for full corrosion resistance
- New integrated options for increased pump health monitoring capabilities and extending pump service intervals
- Extended process lifetime
- Low power consumption
A 3004: The new standard for 3000 m3/h pumping speed – CVD Applications - Highest performance at the lowest operating cost
On the most advanced CVD applications, the A 3004 pump offers the best compression ratio under process flow operation for a wider process window.
Customer benefits
§ Better Tool uptime
o High MTBF
o Full corrosion resistant materials
o Wide operating temperature range
o Integrated hot N2 injection prevents exhaust clogging
§ Savings
o Low power consumption
o Low cost of ownershi
o High efficiency motors
o Optimized electrical heaters
§ Intelligent
o Extended monitoring functionalities provide better control of pump conditions (water sensor, vibration box)
§ IP33, Semi S2 and UL compliant
Applications
- Semiconductor industry (Etch, PECVD, SACVD, ALD, ...)
- Coating industry: Displays, Photovoltaic & LED
Pfeiffer Vacuum
Nashua, NH
Tel: 1-603-578-6500
E-mail: contact@pfeiffer-vacuum.com
