DISCO announce installation of Deionized Water Recycling Unit
Semiconductor equipment manufacturing company DISCO Corporation has announced the first installation of DWR1710 (an ultra-compact deionized water recycling unit for dicing saws) at a customer's site.
DWR1710 has more specialized functions for recycling deionized water compared to the existing multifunctional units and is a compact unit with a small footprint of 0.31 m2 by achieving further miniaturization. Expanding the product range of the DWR series enables us to provide and establish deionized water recycling systems based on the customer's needs, such as their manufacturing facilities and their volume of production.
In addition to wastewater from processing silicon wafers, the DWR series can also recycle wastewater from processing compound semiconductors, ceramics, and glass wafers. The customer who installed the first DWR1710 installed the unit together with a manual dicing saw for the purpose of cutting ceramics, and manufactures electronic components with saved space inside the clean room without industrial drainage piping. In addition, pipe cleaning and dicing saw maintenance operations were frequently needed since the customer used only a filtration apparatus and therefore manufactured their products by recycling water that was not deionized. However, the maintenance frequency is minimized and the downtime of the manufacturing facilities is reduced by recycling deionized water with DWR1710.
