+44 (0)24 7671 8970
More publications     •     Advertise with us     •     Contact us
News Article

Hitachi High-Tech Introduces New Field-Emission Scanning Electron Microscopes

News

Hitachi High-Tech has announced the introduction of the new Regulus series of field emission scanning electron microscopes (FE-SEM) on May 30. As a new brand for FE-SEMs, the Regulus series lineup comprises four models: the Regulus8100, developed as the successor to the SU8010, as well as the Regulus8220, Regulus8230, and Regulus8240, which extend the functions of the SU8200 series with the use of a common platform. The Regulus series offers enhanced functionality with improved resolution and operability.

Scanning electron microscopes (SEMs) are used to observe material structures in a diverse range of scientific fields, including nanotechnology, semiconductors/electronics, biology. and materials science. In recent years, cutting-edge science and technology around the world have been supported by advances in research into graphene and other new carbon materials expected to be applied to next-generation electronic devices, as well as polymeric materials and composite materials. SEMs used in the observation and evaluation of these materials must have low-accelerating-voltage imaging capabilities and high-sensitivity elemental-analysis capabilities to enable observation of surface microstructures as well as ultra-high-resolution imaging capacity. Moreover, SEMs must be able to consistently and reliably perform these functions.

With optimized electron optical systems, the new Regulus series features resolutions down to 0.9 nm in the Regulus8220/8230/8240 models and 1.1 nm in the Regulus8100 model"”an improvement of roughly 20% in resolution at 1 kV landing voltage compared with previous models. The Regulus series employs a novel cold-field-emission (CFE) gun optimized for high-resolution imaging at low accelerating voltages. This CFE gun makes it possible to magnify high-resolution images of up to 2 million times,*1 compared with 1 million times in previous models. User-support functions have also been enhanced so that the advanced performance of the series can be fully leveraged, including functions to assist the operation of the signal detection system for analyzing diverse types of materials, as well as device-maintenance functions.

Photonis announces agreement to acquire Xenics, a leader in Infra-Red imaging solutions
Phlux Technology Secures £4m in Seed Funding
Start-ups: build up your ecosystem
Trends in the semiconductor industry
Advantest Unveils E5620 DR-SEM for Review and Classification of Ultra-Small Photomask Defects
Xenics introduces Wildcat+ 640
Advantest Introduces New inteXcell Series
Sony Semiconductor Israel Redefines IoT Connectivity Platform
Sensor Sales Stay Strong Due to Big ASP Rise
Advantest Launches ACS Solution Store to Enable Real-Time Data Analytics Solutions
Lam Research Acquires SEMSYSCO to Advance Chip Packaging
Infineon planning a major investment in a new factory in Dresden
Particle Measuring Systems introduces 10 nm aerosol particle counter
EBARA presents DYNOX Gas Abatement System
TSMC Launches OIP 3DFabric Alliance
DuPont reshapes IC materials manufacturing for post-COVID success
Evolving subfab vacuum challenges demand collaborative solutions
Next-gen low-k films can address present, future fabrication challenges
Critical Manufacturing redefines semiconductor MES for greater agility, success
Brewer Science bonding & dielectric materials deliver packaging solutions for 5G, IoT devices
Cutting FOPLP pattern distortion
EV Group advances leadership in optical lithography
ASM joins semiconductor climate consortium
KLA Launches New Double-Sided Direct Imaging Platform
Micron ships advanced DRAM technology with 1β node
Nor-Cal will do business as Pfeiffer Vacuum
ClassOne Equipment Releases Major New Lot of Used Semiconductor Tools for Resale
Park Systems Celebrates the Merger and Acquisition of Accurion GmbH
Amkor to support European semiconductor ecosystem
Nanometre components require sub-nanometre precision
ALD TechDay for More-than-Moore devices
Cadence Expands Collaboration with Samsung Foundry

{inStory3}
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in: