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Oxford Instruments Installs New Plasma Etch Tools In Taiwan Lab

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PlasmaPro 100 Cobra and PlasmaPro 100 Polaris ICP etch tools at ITRI focus on optoelectronic, wide band gap discrete device and sensors

Oxford Instruments has recently installed state of the art plasma etch equipment in its applications laboratory at the Industrial Technology Research Institute (ITRI) in Taiwan. This further enhances the existing etch and deposition capabilities already provided by Oxford Instruments at the Institute.

The brand new PlasmaPro 100 Cobra and PlasmaPro 100 Polaris ICP etch tools were installed this month and are designed to serve its Asian customers, with a focus on the optoelectronic, wide band gap discrete device and sensors markets.

Ian Wright, VP sales and service for Asia, Oxford Instruments Plasma Technology, states: "As a company we are dedicated to delivering process solutions to our customers. These new tool installations show our commitment to achieving this for our Asian customers and complement our existing plasma etch and deposition systems already established in ITRI, enabling us to deliver efficient local service to our Asian markets. Our customers have the added benefit of full support from our dedicated applications team based in Taiwan ensuring a fast response to customer enquiries."

These recent improvements to the ITRI laboratory continue the long-standing research-based collaboration agreement between the two companies, based on Oxford Instruments providing a research centre staffed by Oxford Instruments' process engineers at ITRI to the benefit of the extensive Far East customer base.



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