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Magnetically Levitated Turbopumps

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xPfeiffer Vacuum ATH 3204 M/ATH 2804 M turbopumps offer a gas throughput of over 5,000 sccm of nitrogen for non-heated applications. They also allow the highest throughput on the market with up to 1,500 sccm of argon and a pump operating temperature of 65°C in corrosive applications.

High temperature operation: The pumps operate at high temperatures up to 85 °C (MT version) for use in the most aggressive applications with by-product deposition sensitive processes.

Compact: The newest generation of ATH M pumps includes integrated drive electronics to ensure a small footprint and easy plug-and-play installation. The total height of the DN 320 flange model is less than 400 mm. New electronics permit the pumps to be started and stopped within 8 minutes.

5-axis magnetic levitation: Active magnetically levitated bearings enable wear-free, low vibration operation with an automatic out-of-balance compensation. They are maintenance-free and require no lubrication. Continuous rotor stability is assured for reliable performance.

Energy saving: Low power consumption at nominal speed and the lowest cooling water consumption (1 l/min) in their class of pumps also characterize the ATH M pumps.

Customer benefits

· High gas throughput and high temperature operation required in harsh applications

· Tolerates exhaust pressure up to 3.4 mbar

· Low vibration operation with an automatic out-of-balance compensation

· Compact foot print to save variable space in a tool

· Integrated drive electronics for a wide range of applications

· Simple installation and easy start-up

· Energy saving – low electricity and cooling water consumption

Turbopumps with 5-axis magnetic levitation

Electro-magnetic bearings are also called "active magnetically levitated", because the rotor position is continuously monitored and adjusted accordingly. This enables wear-free, low vibration operation with an automatic out-of-balance compensation. Continuous rotor stability is assured. These bearings are maintenance-free and require no lubrication.

Leading performance

Highest pumping speed, compression and gas throughput as well as minimal vibration are vacuum parameters which our customers expect. All 5-axis magnetically levitated pumps in the series deliver excellent performance data in their specialized fields. This makes them the perfect answer for all noncorrosive applications in analytics, research & development as well as in reactive processes in the coating and semiconductor markets.

Safe

Our turbopumps in the ATH M and ATP M series are not just magnetically levitated – an active 5-axis magnetic bearing monitors the position of the rotor and regulates any deviation from the correct position in real-time. Through the use of this high-quality bearing technology, we achieve the best possible long-term stability and reliability coupled with quiet running properties. The bearing technology and process orientation of the high vacuum pumps make our ATH M and ATP M series a benchmark for high-performance turbopumps in semiconductor production, coating and dry-etching plasma processes as well as in many industrial and R&D applications.


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