Info
Info
News Article

Magnetically Levitated Turbopumps

News

xPfeiffer Vacuum ATH 3204 M/ATH 2804 M turbopumps offer a gas throughput of over 5,000 sccm of nitrogen for non-heated applications. They also allow the highest throughput on the market with up to 1,500 sccm of argon and a pump operating temperature of 65°C in corrosive applications.

High temperature operation: The pumps operate at high temperatures up to 85 °C (MT version) for use in the most aggressive applications with by-product deposition sensitive processes.

Compact: The newest generation of ATH M pumps includes integrated drive electronics to ensure a small footprint and easy plug-and-play installation. The total height of the DN 320 flange model is less than 400 mm. New electronics permit the pumps to be started and stopped within 8 minutes.

5-axis magnetic levitation: Active magnetically levitated bearings enable wear-free, low vibration operation with an automatic out-of-balance compensation. They are maintenance-free and require no lubrication. Continuous rotor stability is assured for reliable performance.

Energy saving: Low power consumption at nominal speed and the lowest cooling water consumption (1 l/min) in their class of pumps also characterize the ATH M pumps.

Customer benefits

· High gas throughput and high temperature operation required in harsh applications

· Tolerates exhaust pressure up to 3.4 mbar

· Low vibration operation with an automatic out-of-balance compensation

· Compact foot print to save variable space in a tool

· Integrated drive electronics for a wide range of applications

· Simple installation and easy start-up

· Energy saving "“ low electricity and cooling water consumption

Turbopumps with 5-axis magnetic levitation

Electro-magnetic bearings are also called "active magnetically levitated", because the rotor position is continuously monitored and adjusted accordingly. This enables wear-free, low vibration operation with an automatic out-of-balance compensation. Continuous rotor stability is assured. These bearings are maintenance-free and require no lubrication.

Leading performance

Highest pumping speed, compression and gas throughput as well as minimal vibration are vacuum parameters which our customers expect. All 5-axis magnetically levitated pumps in the series deliver excellent performance data in their specialized fields. This makes them the perfect answer for all noncorrosive applications in analytics, research & development as well as in reactive processes in the coating and semiconductor markets.

Safe

Our turbopumps in the ATH M and ATP M series are not just magnetically levitated "“ an active 5-axis magnetic bearing monitors the position of the rotor and regulates any deviation from the correct position in real-time. Through the use of this high-quality bearing technology, we achieve the best possible long-term stability and reliability coupled with quiet running properties. The bearing technology and process orientation of the high vacuum pumps make our ATH M and ATP M series a benchmark for high-performance turbopumps in semiconductor production, coating and dry-etching plasma processes as well as in many industrial and R&D applications.

Intel Shines Amidst The Carnage Of The 2019 Semiconductor Market
Semiconductor Memory Adoption To Be Augmented By Penetration Of Smartphones Across The Globe
Picosun Reinforces Local Operations During The COVID-19 Epidemic
Efinix’s Trion FPGA Silicon Platform Expands Into Europe
WEBINAR: Smart Manufacturing
DISCO Presented With The Supplier Continuous Quality Improvement (SCQI) Award By Intel Corporation
Infineon Technologies AG Completes Acquisition Of Cypress Semiconductor Corporation
The AP&S Demo Center Will Help You. Request Your Wet Process Demonstration And Be Part Of It Live Via Video Chat.
Pfeiffer Vacuum Introduces Extremely Quiet, Dry Pumps
SUSS MicroTec Purchases The Inkjet Printer Division Of Meyer Burger B.V.
Infineon Withdraws Outlook For FY20
Imec Builds World’s First Spiking Neural Network-Based Chip For Radar Signal Processing
Imagination Technologies Commits To The UK As It Looks To Accelerate Growth In New Areas Of Technological Innovation
Particle Measuring Systems Releases 20 Nm Syringe Sampler
Structural Defects In A TO-220
Dow Launches Fast Curing Silicone Adhesive
Ereztech Expands US Footprint, Opens R&D Lab
Oxford Instruments’ Plasma Technology And NanoScience Businesses Collaborate With The Consortium
Park Systems Completes Equity Investment In Molecular Vista
ACM Research Launches Stress-Free Polishing Tool For Advanced Packaging Applications; Delivers First Tool To Leading Chinese OSAT
Semiconductor Manufacturing: Achieving Water Authority Compliance
Picosun And A*STAR’s IME To Create Novel, High Performance Memories
SPTS Technologies Honored With Queen’s Award For Enterprise In Innovation 2020 For Its Mosaic FxP Plasma Dicing System
Park Systems Announces $1 Million Dollar Nano Research Grant Fund

Info
×
Search the news archive

To close this popup you can press escape or click the close icon.
Logo
×
Logo
×
Register - Step 1

You may choose to subscribe to the Silicon Semiconductor Magazine, the Silicon Semiconductor Newsletter, or both. You may also request additional information if required, before submitting your application.


Please subscribe me to:

 

You chose the industry type of "Other"

Please enter the industry that you work in:
Please enter the industry that you work in:
 
X
Info
X
Info
{taasPodcastNotification}