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Leak Check Semiconductor Process Chambers Quickly And Reliably

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INFICON, a manufacturer of leak test equipment, has introduced the UL3000 Fab leak detector for semiconductor manufacturing maintenance teams to easily check the tightness of vacuum chambers for wafer production. Special advantages of the new leak detector are its fast readiness and simplicity enabling the operator to find leaks of all sizes with the same procedures. It also has a slim mobile design for easy manoeuvrability and an intuitive operating concept for easy operation. The UL3000 Fab, which uses helium as a test gas, detects even the smallest leakage rates up to 5 x 10-12 atm cc/, thus providing the highest seal confirmation tightness of vacuum chambers for wafer production.

Daniel Hoffman, Sales and Service Manager for Leak Detection in the Americas, sees the new model as a big step forward. "Constantly innovating and optimizing our products to meet customer needs is a core goal for INFICON. With our new UL3000 Fab we will enable leak detection productivity gains never before seen in the semiconductor leak testing process," said Hoffman.

The powerful, compact and smart leak detector enables testing at atmospheric pressure (through MASSIVE leak function) with best in class time to test or background generation, saturation protection, smart power and PM saving control all in a compact package. With its narrow design (only 18.6 inches wide), the mobile leak detector is designed for high manoeuvrability.


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