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Edwards Launches New IXH Mk2 Dry Pump

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Provides significant cost savings for ultra-harsh semiconductor processing

Edwards has announced the new iXH Mk2 Series - a high efficiency, low-power, ultra harsh duty dry pump that meets today's semiconductor process requirements and addresses tomorrow's emerging application challenges in the semiconductor, display, LED and solar PV manufacturing processes.

Edwards will showcase the new iXH Mk2 solution at SEMICON China, taking place March 20-22, SNIEC, Shanghai.

“The new iXH Mk2 dry pump provides an even longer service life than previous generations for the harshest of processes. It can also provide significant improvements in power efficiency,” said Al Brightman, senior product manager, Edwards.

“Leveraging 100 years of technology innovation, we have ‘reset the bar' for harsh process capability, reliability and low cost-of-ownership. The iXH reduces the environmental impact of some of the harshest processes used in semiconductor manufacturing.”


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