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Oxford Instruments Supplies HLJ with VCSEL tools


Taiwanese firm orders multiple plasma etch and deposition solutions for 6 inch wafer production

Oxford Instruments Plasma Technology, a supplier of plasma etch and deposition tools, has announced that HLJ Technology, based in Hsin Chu, Taiwan has selected multiple Oxford Instruments Inductively Coupled Plasma (ICP) etch and PECVD systems on cluster platforms for the production of 6-inch VCSEL wafers.

Recently, HLJ had built a mass production line for 6-inch VCSEL wafers to enhance efficiency, and expedite greater control of production lead-times, capacity and quality. The in-house line integrated epitaxial structure design, growth, wafer processes and reliability tests. HLJ is committed to providing one-stop VCSEL devices shopping services for global users.

Dr. Lai general manager of HLJ comments: “We chose Oxford Instruments to supply our ICP etch and PECVD systems because they offer cutting edge plasma processing solutions and unrivalled process support, which will be invaluable to us.”

Ian Barkshire, CEO of Oxford Instruments commented: “We are delighted that HLJ has chosen multiple Oxford Instruments systems for the production of high technology VCSEL devices. We continue to strengthen our position as a solution provider for compound semiconductors, including the VCSEL market. This partnership reinforces our commitment to enhance market- production capabilities “.

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