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News Article

Denton's Cluster tool pushes productivity

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Denton Vacuum LLC has shipped a second Infinity cluster tool to an Asian semiconductor manufacturer.

The Infinity is Denton's most capable system platform, delivering breakthroughs in yield, throughput and equipment uptime through multiple, independent and simultaneous processes in a fully automated, high-reliability cluster configuration.

This customer's first Infinity system is now in operation supporting new device development- its second Infinity system will support high volume manufacturing.

Denton's Infinity platform can be configured with different processes on the same fully integrated tool. 

Denton customers in the research and development community can combine deposition technologies as varied as thermal and e-beam evaporation, RF bias clean, magnetron sputtering, and plasma enhanced CVD into a single Infinity platform. 

These users are rewarded with higher experimental productivity by taking advantage of the Infinity's fully automated, multi-process recipe management tools. In addition, Infinity's fully isolated process chambers and in-situ wafer transfer yield more consistent film properties, translating into more repeatable and meaningful results.

The Infinity is also a platform for high-volume manufacturing. Multiple process chambers handling wafers and substrates up to 200 mm in diameter can be set-up for a single deposition process, or multiple processes depending on user requirements. 

Wafer transfer is supported by a vacuum-isolated load lock with optional wafer cassette handling and a Genmark centre-point substrate handling robot. Denton's ProcessPro control system completes  the Infinity's high volume manufacturing feature set providing distinct operating modes for operators, engineers and manufacturing technicians, sophisticated recipe writing and storage, programmable setpoints and alarms, sophisticated data logging, and remote access and diagnostics.

Rod Moore, President and CEO of Denton Vacuum, says, "Our customer's wide R&D and high productivity needs created unique demands for a flexible operating platform. Denton's Infinity cluster tool places our customer firmly in control of both their R&D and manufacturing requirements, demonstrating that flexibility turns "˜barriers into breakthroughs' for our customers. We see our customers more and more relying on Denton to provide unique, flexible solutions to our customers' unique, customized R&D and high-volume manufacturing needs."

Denton Vacuum transforms barriers into thin-film technology breakthroughs for customers across the globe. With operations in the United States and China, Denton designs and develops systems that precision-coat aerospace components, advanced optics, medical implants, solar cells, semiconductor devices and more.

 

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