LayTec and Evatec unite in OEM partnership
The OEM partnership enables an ongoing close cooperation for integration of advanced in-situ metrology in Evatec's reactors
LayTec has signed a strategic OEM agreement with Evatec Ltd. based in Switzerland. Evatec is a supplier of thin film deposition systems to semiconductor manufacturers.
LayTec will equip Evatec with high precision in-situ metrology tools for versatile process control.
Evatec's evaporation, sputter and PECVD systems are used in the MEMS, optoelectronics, precision optics and other semiconductor markets.
LayTec's metrology tool EpiCurve TT is already successfully applied on Evatec sputter systems for stress management of metal multi-layers for wafers used for optoelectronic applications.
EpiCurve TT enables strain-engineering of the multi-layer structures by real-time tuning of the sputter parameters.The results were presented at CS International Conference in March 2013.
Evatec's Senior Process Engineer Silvia Schwyn Thöny comments, "With LayTec's state-of-the-art in-situ metrology we are able to meet the growing demands on precise process control and optimisation, which is the key to high yields and low costs."
"For LayTec, an OEM cooperation with Evatec is of strategic importance," adds LayTec"˜s CEO Thomas Zettler. "It will enable implementation of our metrology into processes beyond LayTec's established applications. And when Swiss precision meets German quality standards, the expectations can never be too high."
LayTec develops and manufactures integrated in-situ and in-line metrology for thin-film deposition and other high value generating processes. Currently, the company has more than 1500 metrology systems installed worldwide and offers a global customer support and service network including local representations.
