News Article
Axcelis ships implanter to major Flash manufacturer
The company's Purion M platform is claimed to deliver industry leading purity, precision and productivity for the 16nm era and beyond
Axcelis Technologies has shipped its new Purion M medium current implanter (shown above) to a major semiconductor manufacturer located in Asia. Axcelis provides ion implantation solutions for the semiconductor industry. The Purion M is part of the company's expanding family of next generation Purion implanters, specifically designed to provide leading purity, precision, and productivity.
The system will be used to develop and manufacture next generation memory and Flash devices. The new Purion M medium current system utilises Axcelis' spot beam line technology coupled with the Purion 500 WPH single wafer platform. The firm says this combination provides chip manufacturers with exceptional reliability, and remarkable precision and productivity for the widest range of implant energies and doses to address applications that include the formation of precise wells, channels and source/drain junctions. In addition, the system's range and beam currents enable it to be utilised for implant processes traditionally run on high energy or high current implanters. This provides chipmakers with maximum manufacturing versatility and capital efficiency. The Purion M's beam line design utilises Axcelis' patented angular energy filter and angle control system, eliminating all forms of energy contamination while ensuring an accurate dopant placement. The result is a very pure and precise implant, enabling the highest production yields. The system is part of the company's expanding line of next generation Purion implanters, enabling high yield manufacturing of sub 16nm planar and 3-D devices. The Purion platform was designed to drive manufacturing flexibility and lower the total cost of fab operations. It features common end station architecture and spot beamline design, advanced filtration systems, and innovative angle control and constant focal length scanning systems. The firm says the result is absolute beam purity and the most precise dopant placement possible, while ensuring the highest levels of productivity and capital efficiency. Axcelis has been providing innovative, high-productivity solutions for the semiconductor industry for over 35 years. The company enables process applications through the design, manufacture and complete life cycle support of ion implantation systems, one of the most critical and enabling steps in the IC manufacturing process.