AZ enhances commercial direct self-assembly
DRAM and logic customers are pursuing DSA due to the high cost and delayed introduction of EUV lithography equipment, and costly multiple patterning techniques
AZ Electronic Materials (AZ) has commissioned a new pilot-scale Block Copolymer (BCP) reactor system at its Wiesbaden, Germany facility for DSA commercialisation.
AZ has installed the system with the capability of producing batch sizes to meet the requirements of customers using DSA processes in evaluation and pilot manufacturing, with the first production batch of BCP having been recently qualified.
The firm is an expert in materials and processes for direct self assembly (DSA) and is working closely with semiconductor consortia and tool suppliers to extend its position.
Materials for DSA processes are available for both the orientation controlling underlayer (AZEMBLY NLD series) and the block copolymer (AZEMBLY PME series) for patterning contact hole and dense line systems over a range of feature sizes targeted by the semiconductor industry.
The BCP is made in AZ's Wiesbaden plant, shown in the photo at the top of this article. The BCP is formulated into the PME series products at either its Branchburg, New Jersey, or Shizuoka, Japan, manufacturing plants, using 300mm wafer testing equipment.
The NLD series is formulated in the Branchburg plant.
DRAM and logic customers are aggressively pursuing DSA due to the high cost and delayed introduction of extreme ultraviolet (EUV) lithography equipment, and the costly multiple patterning techniques currently employed.
AZ understands the challenges associated with the introduction and development of DSA for semiconductor manufacturing, and is making investments in both capital equipment and personnel to support our Research & Development group in addressing these issues, in order to provide customers with a tightly controlled product that will deliver excellent repeatability and low defects.
The company expects, as it continues to work closely with key customers, that the industry will make advances towards using DSA in manufacturing within the next two to three years.
AZ is a producer of high quality, high-purity specialty chemical materials for the fast growing electronics market. Its materials are widely used in integrated circuits (ICs) and devices, flat panel displays and light-emitting diodes (LEDs).
The firm operates in 9 countries, namely China (including Hong Kong), India, South Korea, Taiwan, Japan, Singapore, the USA, France and Germany. It also has corporate and support services offices in Luxembourg, the UK and Hong Kong, and employs over 1,000 people globally.
