Nova bags big order from major memory manufacturer
The company's NovaMARS OCD software solution will be implemented in 1X NAND and 2X DRAM technology nodes
Nova Measuring Instruments Ltd. has announced that a memory manufacturer recently placed a significant order for multiple software licenses of its NovaMARS 3D modelling solution.
Nova is a provider of stand-alone metrology and integrated metrology solutions to the semiconductor process control market.
The company says this order represents a significant milestone in its's effort to diversify its product portfolio towards software solutions which cater for the industry's most complicated process challenges.
The modelling software will be used with both existing as well as new models of metrology systems, and is part of a multiphase process of upgrading a large fleet of new and existing tools with 3D Optical CD licenses.
The solution will enable advanced process control at 1X technology nodes for NAND and 2X technology nodes for DRAM.
The need for 3D Optical CD metrology is driven by the aggressive device scaling at 1X NAND and 2X DRAM. In order to reduce signal crosstalk between neighbouring metal lines and improve Advanced Process Control capabilities, there is need to move from solid (1D) to MLT (3D) Optical CD measurements.
Nova MARS' enhanced version, including Nova's Holistic Metrology approach, enables this functionality, and will be activated on existing and new fleets of metrology tools in both DRAM and NAND advanced lines.
"We are pleased to see the growing adoption of 3D Optical CD metrology for process control and are happy to assist one of the leading memory manufacturers in meeting the current and future challenges of high end memory production", says Eitan Oppenhaim, Executive Vice President of Global Business and CEO-elect at Nova.
He continues, "The memory market is in a state of extending the current design as much as possible as the industry prepares for the move to 3D NAND and 3D DRAM gates. Nova's unique experience and leadership in 3D Optical CD metrology worldwide, enables smooth implementation of this process control scheme for memory customers, as their processes become more complex. This order is testament to the success of our strategic software development efforts."
The company also reported that it expects most of the already booked solutions to be installed during the second half of 2013.
