Asian foundry to detect defects on 300mm or 450mm wafers with JV tool
Jordan Valley (JV) has shipped a JVSensus system to a leading Asian semiconductor foundry manufacturer, which has adopted the tool as part of its process characterisation line.
The JVSensus system provides non destructive, in-line tool for detection of non visual, crystalline defects (NVD) on patterned or blanket wafers. It is a fully automated X-ray transmission topography system which enables in-line detection of non visual crystalline defects on patterned or blanket 300mm or 450mm wafers.
The system was designed for fully fab automation and automatic defect detection and classification. These defects, such as micro-cracks, slip lines and point defects, may cause a wafer breakage or device failure during rapid thermal processes such as fast laser annealing, or during wafer handling. For more detailed imaging of the defects, JVSensus supports dual resolution and enables non destructive wafer cross-section imaging.
JVSensus defect inspection tool
Isaac Mazor, Jordan Valley's CEO, says, "We are pleased to have been selected by the leading semiconductor foundry to support their advanced manufacturing yield by detecting and classifying those process-induced defects that may lead to catastrophic wafer breakage."
"This selection represents the customer's confidence in Jordan Valley's ability to provide a valuable defect detection solution for their demanding applications, trusting the fully automated innovative X-ray imaging system to provide valuable means for yield improvement and good ROI," adds Mazor.
Paul Ryan, Jordan Valley's UK subsidiary manager, continues, "Advanced technology nodes, particularly 20nm nodes and below, set new yield challenges, partly due to new 3D FinFET structures combined with aggressive thermal processes. These aggressive laser annealing processes increase the importance of any mechanical backside or edge damage, resulting in cracks and an increased likelihood of wafer breakage inside the process chamber."
"This selection for the JVSensus is evidence that our strategy of turning X-Ray imaging into production worthy defect detection tool, successfully delivers the right product for the benefit of our customers,".
