News Article
FB-CVD Tool for Particle and Small Structure Coatings announced
In FBCVD simple or complex shapes are coated by passing precursors over their hot (or cooled) surfaces as they are suspended in a fluidized bed of either sand or an equivalent powdered material. Heating is used when decomposing precursors and cooling is used when condensing materials such as polymers on the particles.
Coatings can be performed sequentially or as a complex multicomponent material in order to build up single, multiple, or functional layer coatings. The structures can be grown using a variety of chemistries in a variety of atmospheres and can be passivated in place for packaging. This vertical tube system is designed for researchers who desire to coat powders and small complex structures.
The system features gas inlets, a switching manifold, heating zone - a 25mm x 100mm deposition zone (alternative sizes are available), height adjustable heating for controlling readouts, easy loading, a mobile enclosed housing, and a user friendly operation. The self-contained system occupies a ~2' by 4' footprint.
