Nova bags order from major memory manufacturer
A leading Asian memory manufacturer has placed its first order for Israeli - headquartered Nova Measuring Instruments' Optical CD metrology solution.
Nova is a provider of stand-alone metrology and integrated metrology solutions for semiconductor process control.
The latest order was placed following last year's announcement of the Nova T600 standalone delivery, for the development and collaboration of the next generation of advanced NAND technology.
Nova T600 system
The Nova T600 is suited in the analysis of advanced 2D/3D devices using multi-channel measurements to enhance accuracy. By combining spectroscopic reflectrometry and scatterometry, the Nova T600 measures critical dimensions (CD) in complex layer stacks.
The system can provide information about trench depth and photoresist shape in 3D structures such as FinFETs and vertical NAND chips.
With a robust architecture, the Nova T600 delivers low variability and excellent tool-to-tool matching enabling the monitoring of sensitive parameters throughout the various steps in the process.
The Nova T600 enables fabs to continue to support future innovations as they occur. The modular platform is designed to support next generation 1x nm technology nodes and complex new semiconductor devices.
This major manufacturer joins Nova's customer base, that already includes the leading memory manufacturers in Asia.
The order for the Optical CD metrology solution was received following an intensive year of close collaboration with the customer's R&D centre, for the development of its next generation memory technology.
The solution is designed to support the memory manufacturer in its development of the next generation cutting edge technology for the 1Xnm technology nodes. Nova's suite of modelling capabilities enables the creation of a metrology solution for the customer's complex 3D memory structures.
"With this first time order with a new customer, we are proud to become a supplier to this leading edge memory manufacturer," says Eitan Oppenhaim, Nova's President & CEO.
"This significant step is a result of Nova's successful strategy to engage with customers' R&D centres early in the development stages. We are committed to continuing our efforts to broaden our collaboration with this important customer and further expand our mutual success," he concludes.
