News Article
Nuflare buys Zeiss photomask registration metrology system
The e-beam mask writer manufacturer Nuflare Technology has purchased the Zeiss future photomask registration metrology tool PROVE HR. This advanced system exhibits very good resolution and repeatability.
The high resolution metrology tool PROVE HR will be used to optimise next generation e-beam mask writers.
PROVE HR will enable the calibration of most advanced mask writing tools needed to support upcoming optical as well as next generations lithography technologies like EUV.